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Date: August 2, 2023


China, [Shenzhen]—August 1 news, according to the news from Securities Daily quoted by Xinhuanet, Shanghai Microelectronics has made a major breakthrough in the research and development of 28nm immersion lithography machine! It is expected to deliver the first domestically produced 28nm lithography machine equipment to the market at the end of the year! This milestone achievement marks the achievements of China's continuous innovation and development in the semiconductor field and is expected to further promote the technological level and production capacity of domestic chip manufacturing.


On the basis of the previous 90nm, Shanghai Microelectronics is about to mass-produce a 28nm immersion lithography machine, immersion lithography machine is immersion lithography machine, using ArF light source, that is, 193nm wavelength light source, this is the fourth generation of lithography machine, which marks that there is only one generation gap between China and ASML in lithography machines. With this process technology, Shanghai Microelectronics will also directly catch up with Japanese manufacturers Canon and Nikon, and become the second most advanced photolithography machine in the world after ASML in the Netherlands. Engraving machine manufacturer giant.

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Industry experts said that the successful delivery of the first 28nm process domestic lithography machine will help China reduce its dependence on imported lithography equipment, improve its independent innovation capabilities, and further strengthen China's competitive position in the global semiconductor market. This move is expected to promote the leap-forward development of the domestic semiconductor industry and inject new impetus into China's scientific and technological progress.


The production and use of this lithography machine will also have a positive impact on the ecological chain of the semiconductor industry. With the gradual application of domestic lithography machines, the development of related fields will also be promoted, including chip design, manufacturing equipment manufacturing, material research and development, and other fields.

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The delivery of the first 28nm domestic lithography machine will be a strong proof of the vigorous development of China's semiconductor industry and an important symbol of the continuous rise of China's scientific and technological strength. With the putting into use of this important equipment, China's semiconductor manufacturing industry is expected to usher in a new round of technological innovation and market competition, and take a solid step in promoting the development of national technological innovation.



Tags: ASML
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